SCOPUS 정보 검색 플랫폼

Semiconductor Science and Technology

Volumn 16, Issue 9, 2001, Pages 806-811

Characterization of silica xerogel films by variable-angle spectroscopic ellipsometry and infrared spectroscopy

(7) Himcinschi, C a Friedrich, M a Murray, C a Streiter, I a Schulz, S E a Gessner, T a Zahn, D R T a

a CHEMNITZ UNIVERSITY OF TECHNOLOGY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; HYDROPHOBICITY; INFRARED SPECTROSCOPY; ORGANIC COMPOUNDS; PERMITTIVITY; POROSITY; REFRACTIVE INDEX; SPIN COATING;

HEXAMETHYLDISILAZANE; HYDROPHOBIZATION; MAXWELL-GARNET APPROXIMATION; SILICA XEROGEL FILMS; SOL-GEL SPIN COATING METHOD; TRIMETHYLSILYL; VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETRY;

SILICA;

EID: 0035443280 PISSN: 02681242 EISSN: None Source Type: Journal
DOI: 10.1088/0268-1242/16/9/312 Document Type: Article

Times cited : (22)

References (17)

1
- 0029408019
- (1995) Mater. Chem. Phys , vol.42 , pp. 91
- Cho, C.C.¹ Smith, D.M.² Anderson, J.³

2
- 0031256186
- (1997) MRS Bull. , vol.22 , pp. 39
- Jin, C.¹ Luttmer, J.D.² Smith, D.M.³ Ramos, T.A.⁴

3
- 0343494496
- (1997) J. Appl. Phys. , vol.82 , pp. 1299
- Jo, M.H.¹ Park, H.H.² Kim, D.J.³ Hyun, S.H.⁴ Choi, S.Y.⁵ Paik, J.T.⁶

4
- 84975913552
- (1995) J. Non-Cryst. Solids , vol.186 , pp. 23
- Yokogawa, H.¹ Yokoyama, M.²

5
- 0000332148
- (1995) J. Non-Cryst. Solids , vol.190 , pp. 264
- Prakash, S.S.¹ Brinker, C.J.² Hurd, A.J.³

6
- 0000345105
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 205
- Nitta, S.¹ Pisupatii, V.² Jain, A.³ Wayner P.C., Jr.⁴ Gill, W.N.⁵ Plawsky, J.L.⁶

7
- 0000739985
- (1997) Japan. J. Appl. Phys. , vol.36 , pp. 1355
- Aoi, N.¹

8
- 0000287546
- (Warrendale, PA: MRS)
- (1998) MRS Symp. Proc. ULSI , vol.12 , pp. 347-351
- Winkler, T.¹ Schulz, S.E.² Gessner, T.³

9
- 0003973002
- Bauer G and Richter W (ed); (Berlin: Springer)
- Optical Characterisation of Epitaxial Semiconductor Layers

10
- 0004017086
- (Lincoln, NE: Woollam)
- (1995) Guide to Using WVASE32

11
- 0004040706
- Palik E D (ed); (New York: Academic)
- (1985) Handbook of Optical Constants of Solids

12
- 85010110982
- (1995) J. Non-Cryst. Solids , vol.187 , pp. 395
- Sassella, A.¹ Lucarno, P.² Borghesi, A.³ Corni, F.⁴ Rojas, S.⁵ Zanotti, L.⁶

13
- 0003350952
- (1904) Phil. Trans. R. Soc. A , vol.203 , pp. 385
- Maxwell-Garnet, J.C.¹

14
- 0031256186
- (1997) MRS Bull. , vol.22 , pp. 39
- Jin, C.¹ Luttmer, J.D.² Smith, D.M.³ Ramos, T.A.⁴

15
- 0034229422
- (2000) J. Phys. Chem. B , vol.104 , pp. 6599
- Puurunen, R.L.¹ Root, A.² Haukka, S.³ Iiskola, E.I.⁴ Linblad, M.⁵ Krause, A.O.I.⁶

17
- 84955022033
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 1374
- Theil, J.A.¹ Tsu, D.V.² Watkins, M.W.³ Kim, S.S.⁴ Lucovsky, G.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.