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Volumn 27, Issue 5, 2006, Pages 317-319

Microwave performance of GaAs MOSFET with wet thermally oxidized InAlP gate dielectric

Author keywords

FETs; Gallium arsenide; InAlP native oxide; Microwave; MOSFETs; Oxidation

Indexed keywords

CURRENT DENSITY; DIELECTRIC MATERIALS; GATES (TRANSISTOR); LEAKAGE CURRENTS; MICROWAVES; MOS CAPACITORS; OXIDATION; SEMICONDUCTING GALLIUM ARSENIDE; TRANSCONDUCTANCE;

EID: 33646249130     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2006.872898     Document Type: Article
Times cited : (27)

References (26)
  • 1
    • 0001167649 scopus 로고
    • "Gallium arsenide MOS transistors"
    • H. Becke, R. Hall, and J. White, "Gallium arsenide MOS transistors," Solid State Electron., vol. 8, no. 10, pp. 813-818, 1965.
    • (1965) Solid State Electron. , vol.8 , Issue.10 , pp. 813-818
    • Becke, H.1    Hall, R.2    White, J.3
  • 2
    • 0012203968 scopus 로고
    • z MISFET"
    • Dec
    • z MISFET," J. Appl. Phys., vol. 47, no. 12, pp. 5474-5475, Dec. 1976.
    • (1976) J. Appl. Phys. , vol.47 , Issue.12 , pp. 5474-5475
    • Messick, L.1
  • 5
    • 0028328260 scopus 로고
    • "Gallium-arsenide transistors - Realization through a molecularly designed insulator"
    • Mar
    • P. P. Jenkins, A. N. Macinnes, M. Tabibazar, and A. R. Barron, "Gallium-arsenide transistors - Realization through a molecularly designed insulator," Science, vol. 263, no. 5154, pp. 1751-1753, Mar. 1994.
    • (1994) Science , vol.263 , Issue.5154 , pp. 1751-1753
    • Jenkins, P.P.1    Macinnes, A.N.2    Tabibazar, M.3    Barron, A.R.4
  • 7
    • 0019023053 scopus 로고
    • "Status of the GaAs metal-oxide-semiconductor technology"
    • Jun. ED-27
    • T. Mimura and M. Fukuta, "Status of the GaAs metal-oxide-semiconductor technology," IEEE Trans. Electron Devices, vol. ED-27, no. 6, pp. 1147-1155, Jun. 1980.
    • (1980) IEEE Trans. Electron Devices , Issue.6 , pp. 1147-1155
    • Mimura, T.1    Fukuta, M.2
  • 12
    • 1242332746 scopus 로고    scopus 로고
    • "Depletion-mode InGaAs with oxide gate dielectric grown by atomic-layer deposition"
    • Jan
    • P. D. Ye, G. D. Wilk, B. Yang, J. Kwo, H. J. L. Gossmann, M. Hong, K. K. Ng, and J. Bude, "Depletion-mode InGaAs with oxide gate dielectric grown by atomic-layer deposition," Appl. Phys. Lett., vol. 84, no. 3, pp. 434-436, Jan. 2004.
    • (2004) Appl. Phys. Lett. , vol.84 , Issue.3 , pp. 434-436
    • Ye, P.D.1    Wilk, G.D.2    Yang, B.3    Kwo, J.4    Gossmann, H.J.L.5    Hong, M.6    Ng, K.K.7    Bude, J.8
  • 15
    • 84887398781 scopus 로고    scopus 로고
    • "Oxide based electronics on gallium arsenide"
    • Ph.D. dissertation, Dept. of Elect. Comput. Eng., Univ. California, Santa Barbara
    • P. Parikh, "Oxide based electronics on gallium arsenide," Ph.D. dissertation, Dept. of Elect. Comput. Eng., Univ. California, Santa Barbara, 1998.
    • (1998)
    • Parikh, P.1
  • 16
    • 0009597752 scopus 로고    scopus 로고
    • "Photoluminescence study of hydrogenated aluminum oxide-semiconductor interface"
    • Mar
    • S. S. Shi, E. L. Hu, J. P. Zhang, Y. I. Chang, P. Parikh, and U. Mishra, "Photoluminescence study of hydrogenated aluminum oxide-semiconductor interface," Appl. Phys. Lett., vol. 70, no. 10, pp. 1293-1295, Mar. 1997.
    • (1997) Appl. Phys. Lett. , vol.70 , Issue.10 , pp. 1293-1295
    • Shi, S.S.1    Hu, E.L.2    Zhang, J.P.3    Chang, Y.I.4    Parikh, P.5    Mishra, U.6
  • 17
    • 0042624643 scopus 로고    scopus 로고
    • "Effects of thermally grown native oxides on the luminescence properties of compound semiconductors"
    • Aug
    • M. R. Islam, R. D. Dupuis, A. P. Curtis, and G. E. Stillman, "Effects of thermally grown native oxides on the luminescence properties of compound semiconductors," Appl. Phys. Lett., vol. 69, no. 7, pp. 946-948, Aug. 1996.
    • (1996) Appl. Phys. Lett. , vol.69 , Issue.7 , pp. 946-948
    • Islam, M.R.1    Dupuis, R.D.2    Curtis, A.P.3    Stillman, G.E.4
  • 19
    • 36449008101 scopus 로고
    • 1-xAs-GaAs metal-oxide-semiconductor field-effect transistors formed by lateral water vapor oxidation of AlAs"
    • May
    • 1-xAs-GaAs metal-oxide-semiconductor field-effect transistors formed by lateral water vapor oxidation of AlAs," Appl. Phys. Lett., vol. 66, no. 20, pp. 2688-2690, May 1995.
    • (1995) Appl. Phys. Lett. , vol.66 , Issue.20 , pp. 2688-2690
    • Chen, E.I.1    Holonyak Jr., N.2    Maranowski, S.A.3
  • 20
    • 0037525248 scopus 로고    scopus 로고
    • "Compound semiconductor native oxide-based technologies for optical and electrical devices grown on GaAs substrates using MOCVD"
    • Ph.D. dissertation, Dept. Elect. Comput. Eng., Univ. Texas, Austin
    • A. L. Holmes, "Compound semiconductor native oxide-based technologies for optical and electrical devices grown on GaAs substrates using MOCVD," Ph.D. dissertation, Dept. Elect. Comput. Eng., Univ. Texas, Austin, 1999.
    • (1999)
    • Holmes, A.L.1
  • 23
    • 2342622200 scopus 로고    scopus 로고
    • "Electrical characterization of native-oxide InAlP/GaAs metal-oxide-semiconductor heterostructures using impedance spectroscopy"
    • Apr
    • X. Li, Y. Cao, D. C. Hall, P. Fay, X. Zhang, and R. D. Dupuis, "Electrical characterization of native-oxide InAlP/GaAs metal-oxide-semiconductor heterostructures using impedance spectroscopy," J. Appl. Phys., vol. 95, no. 8, pp. 4209-4212, Apr. 2004.
    • (2004) J. Appl. Phys. , vol.95 , Issue.8 , pp. 4209-4212
    • Li, X.1    Cao, Y.2    Hall, D.C.3    Fay, P.4    Zhang, X.5    Dupuis, R.D.6
  • 24
    • 33646261203 scopus 로고    scopus 로고
    • Heterostructure grown using LP-MOCVD by Epiworks, Inc., Champaign, IL
    • Heterostructure grown using LP-MOCVD by Epiworks, Inc., Champaign, IL.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.