Large-stroke self-aligned vertical comb drive actuators for adaptive optics applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6113, Issue , 2006, Pages

  Carr, Emily ^a,b   Olivier, Scot ^b   Solgaard, Olav ^c  

^a Davis   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^c STANFORD UNIVERSITY   (United States)

Author keywords

Adaptive optics; Micromechanical mirror device; MOEMS; Piston type mirror elements; Spatial light modulator; Surface micromachining; Wavefront correction

Indexed keywords

MICROMECHANICAL MIRROR DEVICE; MOEMS; PISTON-TYPE MIRROR ELEMENTS; SURFACE MICROMACHINING; WAVEFRONT CORRECTION;

ACTUATORS; ARRAYS; LIGHT MODULATION; MICROMACHINING; MIRRORS; OPTICAL DESIGN; OPTICAL DEVICES;

ADAPTIVE OPTICS;

EID: 33646130856     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656508     Document Type: Conference Paper

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