Technology and applications of micromachined silicon adaptive mirrors

Optical Engineering

Volumn 36, Issue 5, 1997, Pages 1382-1390

  Vdovin, Gleb ^a,c,d,e,f   Middelhoek, Simon ^{a,g,h,i,j,k,l}   Sarro, Pasqualina M ^a,b,m,n  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c ITMO UNIVERSITY   (Russian Federation)

^d PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^e SPIE   (Netherlands)

^f OSA   (Netherlands)

^g IBM RESEARCH ZURICH   (Switzerland)

^h UNIVERSITY OF AMSTERDAM   (Netherlands)

ⁱ IBM RESEARCH   (United States)

^j IEEE

^k ROYAL NETHERLANDS ACADEMY OF ARTS AND SCIENCES   (Netherlands)

^l NAES   (United States)

^m UNIVERSITY OF NAPLES FEDERICO II   (Italy)

ⁿ Brown University   (United States)

more..

Author keywords

Adaptive mirror; Adaptive optics; Micro opto electro mechanical systems; Micromachining; Wavefront control; Zoom lens

Indexed keywords

EID: 0003740854     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601334     Document Type: Article

References (13)

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