MOEMS spatial light modulator development at the center for adaptive optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4983, Issue , 2003, Pages 227-234

  Krulevitch, Peter ^a   Bierden, Paul ^f   Bifano, Thomas ^b   Carr, Emily ^a   Dimas, Clara ^f   Dyson, Harold ^c   Hehnbrecht, Michael ^c   Kurczynski, Peter ^c   Muller, Richard ^c   Olivier, Scot ^a   Peter, Yves Alain ^d   Sadoulet, Bernard ^f   Solgaard, Olav ^d   Yang, E H ^e  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b BOSTON UNIVERSITY   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d Stanford University   (United States)

^e CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^f Jet Propulsion Laboratory ^*

Author keywords

Adaptive optics; Astronomy; Center for Adaptive Optics; Spatial light modulator; Vision science

Indexed keywords

ACTUATORS; ASTRONOMY; IMAGE SENSORS; LIGHT MODULATION; MICROELECTROMECHANICAL DEVICES;

VISION SCIENCE;

ADAPTIVE OPTICS;

EID: 0037720343     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. http://cfao.ucolick.org/
2. T. Bifano, J.A. Perreault, and P.A. Bierden, "Micromachined Deformable Mirror for Optical Wavefront Compensation," Proceedings of the SPIE, vol.4124, (2000). pp.7-14
3. N. Doble, Geunyoung Yoon, Li Chen, P. Bierden, B. Singer, S. Olivier, D.R. Williams, "Use of a Microelectromechanical Mirror for Adaptive Optics in the Human Eye," Optics Letters, vol.27, (no. 17), Opt. Soc. America, 1 Sept. 2002. p. 1537-9.
4. C. Dimas, T. Bifano, P. Bierden, J. Perreault, P. Krulevitch, R. Roehnelt, and S. Cornelissen, "Polysilicon Surface Micro-Machined Spatial Light Modulator with Novel Electronic Integration," Design, Integration, Test and Packaging of MEMS / MOEMS, May 6, 2002.
5. M. Helmbrecht, U. Srinivasan, C. Rembe, R.T. Howe, R.S. Muller, "Micromirrors for Adaptive-Optics Arrays," TRANSDUCERS '01, 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, June 10-14, 2001.
6. P. Kurczynski, J. A. Tyson, B. Sadoulet, D. Bishop, and D. R. Williams, "Membrane Mirrors for Vision Science Adaptive Optics," SPIE Vol. 4561, pp. 147-162, MOEMS and Miniaturized Systems II, October 2001, San Francisco, CA.
7. P. Kurczynski, G. R. Bogart, W. Lai, W. M. Mansfield, J. Tyson, B. Sadoulet, and D. R. Williams, "Electrostatically Actuated Membrane Mirrors for Adaptive Optics," SPIE Photonics West, Micromachining and Microfabrication Conference, San Jose, California, USA, January 2003 (This proceedings).
8. E. H. Yang, and K. Shchegelov, "A Piezoelectric Bimorph Deformable Mirror Concept by Wafer Transfer for Ultra Large Space Telescopes," SPIE International symposium on Astronomical Telescopes and Instrumentation, Adaptive Optical System Technologies II, 22-28 August 2002, Waikoloa, Hawaii, USA.
9. E. H. Yang, K. Shcheglov and S. Trolier-McKinstry, "Concept, Modeling and Fabrication Techniques for Large-Stroke Piezoelectric Unimorph Deformable Mirrors," SPIE Photonics West, Micromachining and Microfabrication Conference, San Jose, California, USA, January 2003 (This proceedings).
10. E. H. Yang and D. V. Wiberg, "A New Wafer-Level Membrane Transfer Technique for MEMS Deformable Mirrors," IEEE Micro Electro Mechanical Systems (MEMS) 2001 Conference, Switzerland, 2000, pp. 80-83.
11. A. Gehner, W. Doleschal, A. Eigner, R. Kauert, D. Kunze and M.I Wildenhain, "Active-matrix addressed micromirror array for wavefront correction in adaptive optics," MOEMS and Miniaturized Systems II, Proceedings of SPIE Vol. 4561 (2001) pp. 265-275.
12. S. Cornelissen, T. Bifano, and P. Bierden, "MEMS Spatial Light Modulators with Integrated Electronics," MOEMS and Miniaturized Systems II, Proceedings of SPIE Vol. 4561 (2001) pp. 28-34.
13. M. A. Michalicek and V. M. Bright, "Development of Advanced Micromirror Arrays by Flip-Chip Assembly," MOEMS and Miniaturized Systems II, Proceedings of SPIE Vol. 4561 (2001) pp. 102-113.