Determination of heat and ion fluxes in plasma immersion ion implantation by in situ measurement of temperature using laser interferometry

Surface and Coatings Technology

Volumn 136, Issue 1-3, 2001, Pages 261-264

  Takaki, K ^a   Koseki, D ^a   Fujiwara, T ^a  

^a IWATE UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BIREFRINGENCE; HEAT FLUX; INTERFEROMETRY; LITHIUM NIOBATE; PLASMA APPLICATIONS; SUBSTRATES; TEMPERATURE MEASUREMENT; THERMAL EFFECTS;

LASER INTERFEROMETRY; PLASMA IMMERSION ION IMPLANTATION (PIII);

ION IMPLANTATION;

EID: 0035254684     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)01027-6     Document Type: Article

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