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Thin Solid Films

Volumn 288, Issue 1-2, 1996, Pages 83-85

Measurement of the striking force of Ar ions on the substrate during sputter deposition of a-Si:H thin films

(2) Aida, M S a Rahmane, S a

a Universite Mentouri Constantine (Algeria)

Author keywords

a Si:H; Sputtering

Indexed keywords

AMORPHOUS SILICON; ARGON; DENSIFICATION; FILM GROWTH; HYDROGENATION; ION BOMBARDMENT; MICROSTRUCTURE; PIEZOELECTRIC MATERIALS; PRESSURE EFFECTS; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS;

FILM NETWORK; PLASMA SUBSTRATE INTERACTIONS; PSEUDOSUBSTRATE; STRIKING FORCES;

AMORPHOUS FILMS;

EID: 0030289189 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)08822-0 Document Type: Article

Times cited : (11)

References (15)

1
- 0001574468
- R.A. Street, J.C. Knights and D.K. Biegelson, Phys. Rev. B, 35 (1978) 1880.
- (1978) Phys. Rev. B , vol.35 , pp. 1880
- Street, R.A.¹ Knights, J.C.² Biegelson, D.K.³

2
- 36549098649
- C.C. Tsai, J.C. Knights, G. Chang and B. Wacker, J. Appl. Phys., 59 (1986) 2998.
- (1986) J. Appl. Phys. , vol.59 , pp. 2998
- Tsai, C.C.¹ Knights, J.C.² Chang, G.³ Wacker, B.⁴

3
- 0041719173
- P. Roca i Cabarrocas, Y. Bouizem and M.L. Theye, Philos. Mag. B, 65 (1992) 1025.
- (1992) Philos. Mag. B , vol.65 , pp. 1025
- Roca I Cabarrocas, P.¹ Bouizem, Y.² Theye, M.L.³

4
- 0018334397
- A. Matasuda, K. Nakagawa, K. Tanaka, M. Matsumura, S. Yamasaki, H. Okushi and S. Lizima, J. Non-Cryst. Solids, 35-36 (1980) 183.
- (1980) J. Non-Cryst. Solids , vol.35-36 , pp. 183
- Matasuda, A.¹ Nakagawa, K.² Tanaka, K.³ Matsumura, M.⁴ Yamasaki, S.⁵ Okushi, H.⁶ Lizima, S.⁷

5
- 0001012565
- F. Finger, U. Kroll, V. Viret, A. Shah, W. Beyer, X.M. Tang, J. Weer, A. Howling and C. Hollenstein, J. Appl. Phys., 71 (1992) 5665.
- (1992) J. Appl. Phys. , vol.71 , pp. 5665
- Finger, F.¹ Kroll, U.² Viret, V.³ Shah, A.⁴ Beyer, W.⁵ Tang, X.M.⁶ Weer, J.⁷ Howling, A.⁸ Hollenstein, C.⁹

6
- 0005364093
- B. Drevillon, J. Perrin, J.M. Siffert, J. Huc, A. Lloret, G. deRosny and J.P.M. Schmitt, Appl. Phys. Lett., 42 (1983) 801.
- (1983) Appl. Phys. Lett. , vol.42 , pp. 801
- Drevillon, B.¹ Perrin, J.² Siffert, J.M.³ Huc, J.⁴ Lloret, A.⁵ DeRosny, G.⁶ Schmitt, J.P.M.⁷

7
- 0020949383
- B. Drevillon, J. Huc and N. Boussarssar, J. Non-Cryst. Solids, 59-60 (1983) 735.
- (1983) J. Non-Cryst. Solids , vol.59-60 , pp. 735
- Drevillon, B.¹ Huc, J.² Boussarssar, N.³

8
- 25044459016
- A.M. Antoine, B. Drevillon and P. Roca i Cabarrocas, J. Non- Cryst. Solids, 77-75 (1985) 765.
- (1985) J. Non- Cryst. Solids , vol.77-78 , pp. 765
- Antoine, A.M.¹ Drevillon, B.² Roca I Cabarrocas, P.³

9
- 0012163388
- B. Drevillon, C. Codet and A.M. Antoine, Mater. Res. Soc. Symp. Proc., 75, (1987) 341.
- (1987) Mater. Res. Soc. Symp. Proc. , vol.75 , pp. 341
- Drevillon, B.¹ Codet, C.² Antoine, A.M.³

10
- 0042826134
- PhD Thesis, Paris VII
- J. Perrin, PhD Thesis, Paris VII, 1983.
- (1983)
- Perrin, J.¹

11
- 0027906057
- M.S. Aida, J. Non-Cryst. Solids, 160 (1993) 99.
- (1993) J. Non-Cryst. Solids , vol.160 , pp. 99
- Aida, M.S.¹

12
- 0041824156
- RTC, Paris
- Manuel Technique Ceramiques Piezoelectriques PXE, RTC, Paris, 1981.
- (1981) Manuel Technique Ceramiques Piezoelectriques PXE

13
- 0003667045
- J.D. Joannopoulos and G. Lukovsky (eds.), Springer, New York
- M.J. Thompson, in J.D. Joannopoulos and G. Lukovsky (eds.), The Physics of Hydrogenated Amorphous Silicon I, Springer, New York, 1984, p. 132.
- (1984) The Physics of Hydrogenated Amorphous Silicon I , pp. 132
- Thompson, M.J.¹

14
- 0017926523
- W.D. Westwood, J. Vac. Sci. Technol., 15 (1978) 1.
- (1978) J. Vac. Sci. Technol. , vol.15 , pp. 1
- Westwood, W.D.¹

15
- 0041323521
- PhD Thesis, Lyons
- D.J. Tardy, PhD Thesis, Lyons, 1982.
- (1982)
- Tardy, D.J.¹

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