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Volumn 45, Issue 4 A, 2006, Pages 2531-2533
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Investigation of surface pits originating in dislocations in AlGaN/GaN epitaxial layer grown on Si substrate with buffer layer
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Author keywords
Atomic force microscope; GaN; Plan view TEM; Si substrate; Surface pits
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
DISLOCATIONS (CRYSTALS);
EPITAXIAL GROWTH;
GALLIUM NITRIDE;
SILICON;
SUBSTRATES;
TRANSMISSION ELECTRON MICROSCOPY;
EDGE DISLOCATIONS;
NETWORK STRUCTURE;
SURFACE PITS;
SEMICONDUCTING ALUMINUM COMPOUNDS;
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EID: 33645676372
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.45.2531 Document Type: Article |
Times cited : (7)
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References (12)
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