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Volumn 45, Issue 4 A, 2006, Pages 2531-2533

Investigation of surface pits originating in dislocations in AlGaN/GaN epitaxial layer grown on Si substrate with buffer layer

Author keywords

Atomic force microscope; GaN; Plan view TEM; Si substrate; Surface pits

Indexed keywords

ATOMIC FORCE MICROSCOPY; DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; GALLIUM NITRIDE; SILICON; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

EID: 33645676372     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.2531     Document Type: Article
Times cited : (7)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.