Improvement of electrical properties and reliability of (Ba 0.5Sr0.5)TiO3 thin films on Si substrates by N2O prenitridation

Electrochemical and Solid-State Letters

Volumn 9, Issue 2, 2006, Pages

  Liu, Chien Hung ^a   Wu, Jenn Ming ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

GRAIN SIZE AND SHAPE; LEAKAGE CURRENTS; NITRIDES; PERMITTIVITY; SEMICONDUCTOR MATERIALS; SILICON; SPUTTER DEPOSITION; SUBSTRATES; TITANIUM OXIDES;

BARIUM STRONTIUM TITANATE (BST); ELECTRICAL PROPERTIES; THERMAL NITRIDATION; VOLTAGE HYSTERESIS;

THIN FILMS;

EID: 33645503741     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2139972     Document Type: Article

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