Thickness dependence of characteristics for (Ba, Sr)TiO3 thin films prepared by metalorganic chemical vapor deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 9 B, 2000, Pages 5389-5392

  Takeshima, Yutaka ^a   Tanaka, Katsuhiko ^a   Sakabe, Yukio ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM TITANATE; ENERGY DISPERSIVE SPECTROSCOPY; EPITAXIAL GROWTH; FERROELECTRIC MATERIALS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMITTIVITY; STRONTIUM COMPOUNDS; SUBSTRATES; THICKNESS MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

BARIUM STRONTIUM TITANATE; GRAIN SIZE EFFECT; STRAIN EFFECT; THICKNESS DEPENDENCE;

THIN FILMS;

EID: 0034262865     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.5389     Document Type: Article

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