Electron-beam deposited SiO2 investigated by scanning capacitance microscopy

Applied Physics Letters

Volumn 88, Issue 12, 2006, Pages

  Brezna, W ^a   Fischer, M ^a   Wanzenboeck, H D ^a   Bertagnolli, E ^a   Smoliner, J ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIELECTRIC MATERIALS; MICROSCOPIC EXAMINATION; SEMICONDUCTOR MATERIALS; SILICON COMPOUNDS; SPECTROSCOPY; SUBSTRATES;

CAPACITANCE VOLTAGE MEASUREMENTS; SCANNING CAPACITANCE MICROSCOPY; SEMICONDUCTOR PROTOTYPING APPLICATIONS; TOTAL OXIDE CHARGES;

ELECTRON BEAMS;

EID: 33645500640     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2189030     Document Type: Article

References (13)

1. V. Gopal, V. R. Radmilovic, C. Daraio, S. Jin, P. Yang, and E. A. Stach, Nano Lett. 4, 2059 (2004).
2. T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De-Vittorio, S. Cabrini, A. Carpentiero, and E. Di-Fabrizio, Microelectron. Eng. 78-79, 417 (2005).
3. M. Weber, H. W. P. Koops, M. Rudolph, J. Kretz, and G. Schmidt, J. Vac. Sci. Technol. B 13, 1364 (1995).
4. T. Liang and A. R. Stivers, Proc. SPIE 4688, 375 (2002).
5. H. D. Wanzenboeck, M. Verbeek, W. Maurer, and E. Bertagnolli, Proc. SPIE 4186, 148 (2001).
6. K. Edinger, T. Gotszalk, and I. W. Rangelow, J. Vac. Sci. Technol. B 19, 2856 (2001).
7. S. Lipp, L. Frey, C. Lehrer, B. Frank, E. Demm, S. Pauthner, and H. Ryssel, J. Vac. Sci. Technol. B 14, 3920 (1996).
8. H. Langfischer and E. Bertagnolli, J. Appl. Phys. 93, 5827 (2003).
9. V. V. Zavyalov, J. S. McMurray, and C. C. Williams, Rev. Sci. Instrum. 7, 158 (1999).
10. P. De Wolf, R. Stephenson, T. Trenkler, T. Clarysse, T. Hantschel, and W. Vandervorst, J. Vac. Sci. Technol. B 8, 361 (2000).
11. W. Brezna, M. Schramboeck, A. Lugstein, S. Harasek, H. Enichlmair, E. Bertagnolli, E. Gornik, and J. Smoliner, Appl. Phys. Lett. 83, 4253 (2003).
12. E. H. Nicollian and J. R. Brews, MOS (Metal Oxide Semiconductor) Physics and Technology (Wiley, New York, 1982).
13. W. Brezna, S. Harasek, A. Lugstein, T. Leitner, H. Hoffmann, E. Bertagnolli, and J. Smoliner, J. Appl. Phys. 97, 093701 (2005).