Mapping of local oxide properties by quantitative scanning capacitance spectroscopy

Journal of Applied Physics

Volumn 97, Issue 9, 2005, Pages

  Brezna, W ^a   Harasek, S ^a   Lugstein, A ^a   Leitner, T ^a   Hoffmann, H ^a   Bertagnolli, E ^a   Smoliner, J ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE DENSITY; SCANNING CAPACITANCE SPECTROSCOPY (SCM); THICKNESS VARIATION; VOLTAGE SHIFTS;

ATOMIC FORCE MICROSCOPY; DIELECTRIC PROPERTIES; DOPING (ADDITIVES); ELLIPSOMETRY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOSFET DEVICES; PERMITTIVITY; SILICON; SPECTROSCOPIC ANALYSIS;

ZIRCONIA;

EID: 18844402660     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1881773     Document Type: Article

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