Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system

Microelectronic Engineering

Volumn 78-79, Issue 1-4, 2005, Pages 417-421

  Stomeo, T ^a,b   Visimberga, G ^a   Todaro, M T ^a   Passaseo, A ^a   Cingolani, R ^a   De Vittorio, M ^a   Cabrini, S ^c   Carpentiero, A ^c   Di Fabrizio, E ^c  

^a NATIONAL NANOTECHNOLOGY LABORATORY   (Italy)

^b Ist Superiore Univ per la F   (Italy)

^c LABORATORIO TASC   (Italy)

Author keywords

Finite difference time domain; Focused ion beam; Laser cavity; Photonic crystal

Indexed keywords

CAVITY RESONATORS; CRYSTAL LATTICES; FABRICATION; FINITE DIFFERENCE METHOD; ION BEAMS; MASKS; MIRRORS; PHOTOLUMINESCENCE; PHOTONS; RAPID PROTOTYPING; REACTIVE ION ETCHING; TIME DOMAIN ANALYSIS;

FINITE DIFFERENCE TIME DOMAIN; FOCUSED ION BEAMS; LASER CAVITY; PHOTONIC CRYSTALS;

CRYSTALS;

EID: 14944346871     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2004.12.052     Document Type: Conference Paper

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