Anisotropic etching of SiC whiskers

Nano Letters

Volumn 6, Issue 3, 2006, Pages 548-551

  Cambaz, Goknur Z ^a   Yushin, Gleb N ^a   Gogotsi, Yury ^a   Lutsenko, Vadim G ^b  

^a Drexel University   (United States)

^b INSTITUTE OF HYDROBIOLOGY   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

CELLULAR PROBES; SELECTIVE ETCHING; SILICON CARBIDE (SIC) WHISKERS;

ANISOTROPY; ELECTROMECHANICAL DEVICES; ETCHING; LARGE SCALE SYSTEMS; NITRIC ACID; OPTOELECTRONIC DEVICES;

SILICON CARBIDE;

EID: 33645384234     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl051858v     Document Type: Article

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