Smooth wet etching by ultraviolet-assisted photoetching and its application to the fabrication of AlGaN/GaN heterostructure field-effect transistors

Applied Physics Letters

Volumn 77, Issue 23, 2000, Pages 3833-3835

  Maher, H ^a   DiSanto, D W ^a   Soerensen, G ^a   Bolognesi, C R ^a   Tang, H ^b   Webb, J B ^b  

^a SIMON FRASER UNIVERSITY   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000008175     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1330226     Document Type: Article

References (10)

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