Evolution of hydrocarbon species on a silicon surface during methane plasma investigated by in-situ infrared spectroscopy

Thin Solid Films

Volumn 506-507, Issue , 2006, Pages 710-714

  Shinohara, Masanori ^a   Katagiri, Teruaki ^a   Iwatsuji, Keitaro ^a   Shibata, Hiromichi ^a   Matsuda, Yoshinobu ^a   Fujiyama, Hiroshi ^a  

^a NAGASAKI UNIVERSITY   (Japan)

Author keywords

Hydrocarbon species; Infrared absorption; Methane plasma; Si surface

Indexed keywords

INFRARED SPECTROSCOPY; METHANE; PLASMAS; SILICON;

INFRARED ABSORPTION; METHANE PLASMA; SI SURFACE;

HYDROCARBONS;

EID: 33645307087     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.143     Document Type: Article

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