Behavior of hydride species on Si surface during methane plasma irradiation investigated by in-situ infrared spectroscopy

Thin Solid Films

Volumn 435, Issue 1-2, 2003, Pages 13-18

  Shinohara, Masanori ^a   Kuwano, Takayuki ^b   Kimura, Yasuo ^b   Niwano, Michio ^b  

^a NAGASAKI UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Hydride species; Infrared absorption; Methane plasma; Si surface

Indexed keywords

INFRARED SPECTROSCOPY; METHANE; MOLECULAR VIBRATIONS; MONOLAYERS; PLASMAS; SILICON;

PLASMA EXPOSURE;

DIAMOND LIKE CARBON FILMS;

EID: 0038070074     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00367-5     Document Type: Conference Paper

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