Theoretical and experimental studies for nano-oxidation of silicon wafer by ac atomic force microscopy

Journal of Applied Physics

Volumn 99, Issue 5, 2006, Pages

  Lin, Jen Fin ^a   Tai, Chin Kuang ^a   Lin, Shuan Li ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; GROWTH KINETICS; OXIDATION; THIN FILMS;

GROWTH RATES; KELVIN FORCE MICROSCOPY; MODULATION NUMBER; OXIDE FILMS;

SILICON WAFERS;

EID: 33645226314     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2174721     Document Type: Article

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