Transient dynamics of a MEMS variable capacitor driven with a Dickson charge pump

Sensors and Actuators, A: Physical

Volumn 128, Issue 1, 2006, Pages 89-97

  Jimenez V ^a   Pons, J ^a   Dominguez M ^a   Bermejo, A ^a   Castaner L ^a,c,d,e   Nieminen, H ^b   Ermolov, V ^b  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^b NOKIA RESEARCH CENTER   (United States)

^c IEEE

^d Association and Charter of Telecommunication Engineers   (Spain)

^e IEEE ^*  (Spain)

Author keywords

Charge pump; Dickson pump; MEMS capacitors; MEMS drive; RF devices

Indexed keywords

CHARGE PUMP; DICKSON PUMP; MEMS CAPACITORS; MEMS DRIVE; RF DEVICES;

CAPACITANCE; ELECTRIC CHARGE; ELECTRIC POWER UTILIZATION; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; RELIABILITY;

CAPACITORS;

EID: 33645139265     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.01.032     Document Type: Article

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