Transient capacitance measurement of MEM capacitor

Sensors and Actuators, A: Physical

Volumn 117, Issue 2, 2005, Pages 267-272

  Nieminen, Heikki ^a   Hyyryläinen, Jari ^a   Veijola, Timo ^b   Ryhänen, Tapani ^a   Ermolov, Vladimir ^a  

^a NOKIA RESEARCH CENTER   (United States)

^b AALTO UNIVERSITY   (Finland)

Author keywords

Capacitance measurement; MEM varactor; Reliability; Transient capacitance

Indexed keywords

MEM VARACTORS; RADIO FREQUENCY (RF) SYSTEMS; TRANSIENT CAPACITANCE;

CAPACITANCE MEASUREMENT; COMPUTER SIMULATION; ELECTRIC SWITCHES; FAILURE ANALYSIS; MICROELECTROMECHANICAL DEVICES; RELIABILITY THEORY; TRANSIENTS; VARACTORS; VOLTAGE CONTROL;

CAPACITORS;

EID: 69749091061     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.06.023     Document Type: Article

References (13)

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