Mechanical properties of a micron-sized SCS film in a high-temperature environment

Journal of Micromechanics and Microengineering

Volumn 16, Issue 4, 2006, Pages 715-720

  Nakao, Shigeki ^a   Ando, Taeko ^a   Shikida, Mitsuhiro ^a   Sato, Kazuo ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; ELASTIC MODULI; IMAGE ANALYSIS; SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS; STRAIN; THERMAL EFFECTS; THIN FILMS;

BRITTLE-TO-DUCTILE TRANSITION; ELASTIC-PLASTIC DEFORMATION; FRACTURE STRESS; TENSILE TEST;

SEMICONDUCTING FILMS;

EID: 33645062152     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/4/007     Document Type: Article

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