New fatigue damage evaluation of MEMS materials under tension-compression cyclic loading

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 443-446

  Isono, Yoshitada ^a   Kito, Hiroaki ^a   Kikuchi, Takanori ^a   Shimazu, Takayuki ^b   Katayama, Makoto ^b  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC HYSTERESIS; FATIGUE DAMAGE; LASER REFLECTION; SINGLE CRYSTAL SILICON (SCS);

BENDING (DEFORMATION); COMPRESSION TESTING; COMPRESSIVE STRESS; CYCLIC LOADS; FATIGUE OF MATERIALS; HYSTERESIS; LIGHT REFLECTION; SILICON; SINGLE CRYSTALS; TENSILE TESTING;

MICROELECTROMECHANICAL DEVICES;

EID: 26844480323     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. 2 Wires Based on AFM Technique", Proc. in The Sixteen IEEE Int. Conf. on Microelectromech. Syst., pp.662-665, 2003.
2. Martin A. Schmidt, "Technology for Microturbomachinery", Proc. of The 11th International Conference on Solid-State Sensors and Actuators, Vol. 1, pp. 2-5, 2001.
3. D.Park, D.Lee, J.Yoon, S.Kwon and E.Yoon, "Micro Reciprocating Engine as a Power Source for Microsystems", Power MEMS2002, pp.40-43.
4. Chang-Hyeon Ji, Youngjoo Yee, Junghoon Choi, Hyun-Ho Oh and Jong-Uk Bu, "Latchable Electromagnetic 2×2 MEMS Optical Switch", Proc. in The Sixteen IEEE Int. Conf. on Microelectromech. Syst., pp.239-242, 2003.
5. Takayuki Shimazu, Kei Sunaga and Makoto Katayama, "Fatigue characteristics of Si movable comb inserted into MEMS optical devices", Proc. OFC2004.