LTCC fabrication for a leaf spring vertical actuator

International Journal of Applied Ceramic Technology

Volumn 3, Issue 1, 2006, Pages 61-67

  Newborn, Craig H ^a   English, Jennifer M ^a   Coe, David J ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COST EFFECTIVENESS; ELECTROSTATIC ACTUATORS; FABRICATION; LAMINATES;

ACTUATOR FABRICATION; CERAMIC LAMINATE SYSTEMS (LTCC); ELECTROSTATIC ACTUATION; LEAF SPRING ACTUATOR;

CERAMIC MATERIALS;

EID: 33644889656     PISSN: 1546542X     EISSN: 17447402     Source Type: Journal    
DOI: 10.1111/j.1744-7402.2006.02062.x     Document Type: Article

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