메뉴 건너뛰기




Volumn , Issue , 2000, Pages 35-42

Micro SMA actuator and motion control

Author keywords

[No Author keywords available]

Indexed keywords

HEAT TREATMENT; INDUCTIVELY COUPLED PLASMA; MASS SPECTROMETRY; MOTION CONTROL; SHAPE MEMORY EFFECT; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS; TITANIUM ALLOYS;

EID: 0034590080     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (12)

References (17)
  • 1
    • 0022899211 scopus 로고
    • A new actuator of a joint mechanism using TiNi alloy wire
    • K. Kuribayashi: A New Actuator of a Joint Mechanism Using TiNi Alloy Wire, Int. J. Robotics Res., 4,4, (1986) 47.
    • (1986) Int. J. Robotics Res. , vol.4 , Issue.4 , pp. 47
    • Kuribayashi, K.1
  • 3
    • 0029255761 scopus 로고
    • Transformations in sputter-deposited thin films of NiTi shape memory alloy
    • Y. Q. Yang, H. S. Jia, Z. F. Zhang, H. M. Shen, A. Hu and Y. N. Wang: Transformations in Sputter-deposited Thin Films of NiTi Shape Memory Alloy, Mat. Lett., 22, (1995) 137.
    • (1995) Mat. Lett. , vol.22 , pp. 137
    • Yang, Y.Q.1    Jia, H.S.2    Zhang, Z.F.3    Shen, H.M.4    Hu, A.5    Wang, Y.N.6
  • 8
    • 0029221778 scopus 로고
    • Shape memory behavior of TiNi thin films annealed at various temperatures
    • A. Ishida, A. Takei, M. Sato and S. Miyazaki: Shape Memory Behavior of TiNi Thin Films Annealed at Various Temperatures, Mat. Res. Soc. Symp. Proc. Vol.360, (1995) 381.
    • (1995) Mat. Res. Soc. Symp. Proc. , vol.360 , pp. 381
    • Ishida, A.1    Takei, A.2    Sato, M.3    Miyazaki, S.4
  • 9
    • 0031117669 scopus 로고    scopus 로고
    • Fabrication and transformation of reversible shape memory alloy thin film actuators
    • (in Japanese)
    • Katsutoshi Kuribayashi, Seiji Shimizu, Masaaki Yoshitake, and Sooichi Ogawa, Fabrication and Transformation of Reversible Shape Memory Alloy Thin Film Actuators, Journal of the Japan Society for Precision Engineering, Vol. 63, No. 4, (1997), pp. 530-534, (in Japanese)
    • (1997) Journal of the Japan Society for Precision Engineering , vol.63 , Issue.4 , pp. 530-534
    • Kuribayashi, K.1    Shimizu, S.2    Yoshitake, M.3    Ogawa, S.4
  • 10
    • 0012209401 scopus 로고    scopus 로고
    • Mechanical properties and control of shape memory alloy thin film actuator
    • Katsutoshi Kuribayashi, Seiji Shimizu, "Mechanical Properties and Control of Shape Memory Alloy Thin Film Actuator", Proc. of Actuator 98, Bremen, pp507-510 (1998)
    • (1998) Proc. of Actuator 98, Bremen , pp. 507-510
    • Katsutoshi, K.1    Shimizu, S.2
  • 14
    • 0003492744 scopus 로고
    • Shape-memory alloys
    • translated by J. D. Kennedy, Gordon and Breach, New York
    • H. Funakubo: Shape-Memory Alloys, translated by J. D. Kennedy, Gordon and Breach, New York, (1984).
    • (1984)
    • Funakubo, H.1
  • 15
    • 24544477899 scopus 로고
    • Shape memory alloys and how to use
    • The foundation of Osaka science and technology center, the development committee for uses of shape memory alloys:; Nikkann Kougyou Shinnbunn Sha; (in Japanese)
    • The foundation of Osaka science and technology center, the development committee for uses of shape memory alloys: Shape Memory Alloys and How to Use, Nikkann Kougyou Shinnbunn Sha, (1987) 9-13 (in Japanese).
    • (1987) , pp. 9-13
  • 16
    • 51649147951 scopus 로고
    • Precipitation processes in near-equiatomic TiNi shape memory alloys
    • M. Nishida, C. M. Wayman and T. Honma: Precipitation Processes in Near-Equiatomic TiNi Shape Memory Alloys, Metallurgical Transactions A, 17A (1986) 1505.
    • (1986) Metallurgical Transactions A , vol.17 A , pp. 1505
    • Nishida, M.1    Wayman, C.M.2    Honma, T.3
  • 17
    • 85031157289 scopus 로고    scopus 로고
    • Development of a new micro gas valve composed of a SMA thin film and micro distance sensor
    • Bremen
    • X. Ding, K. Kuribayashi and T.Hashida, "Development of a New Micro Gas Valve Composed of a SMA Thin Film and Micro Distance Sensor", Bremen, pp346-350 (2000)
    • (2000) , pp. 346-350
    • Ding, X.1    Kuribayashi, K.2    Hashida, T.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.