Precise control of small displacements of a stacked piezoelectric actuator by means of layer-by-layer driving

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 248-251

  Kondo, S ^a   Yoshimura, S I ^a   Saito, N ^a   Tanioka, K ^a  

^a NHK SCIENCE AND TECHNICAL RESEARCH LABORATORIES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRODES; LASERS; LAYERED MANUFACTURING; MOTION CONTROL; PIEZOELECTRIC TRANSDUCERS; POLYAMIDES; PRECISION ENGINEERING;

PIEZOELECTRIC ACTUATORS;

ACTUATORS;

EID: 0035011689     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)