Deposition, microstructure and mechanical and tribological properties of magnetron sputtered TiN/TiAlN multilayers

Surface and Coatings Technology

Volumn 123, Issue 2-3, 2000, Pages 219-226

  Andersen, K N ^a   Bienk, E J ^b   Schweitz, K O ^a   Reitz, H ^b   Chevallier, J ^a   Kringhoj P ^a   Bottiger J ^a  

^a AARHUS UNIVERSITY   (Denmark)

^b DANISH TECHNOLOGICAL INSTITUTE   (Denmark)

Author keywords

Multilayer microstructure; Nanoindentation; Tribological properties; Wear mechanism

Indexed keywords

MAGNETRON SPUTTERING; MICROSTRUCTURE; MULTILAYERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; STEEL; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; WEAR OF MATERIALS; X RAY DIFFRACTION ANALYSIS;

NANOINDENTATION; STRESS MEASUREMENT; WEAR MECHANISMS;

PROTECTIVE COATINGS;

COATING; MICROSTRUCTURE; SPUTTERING; TRIBOLOGY; WEAR RESISTANCE;

EID: 0034707773     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00473-9     Document Type: Article

References (11)

1. Clemens B.M., Kung H., Barnett S.A. MRS Bull. 24:1999;20.
2. Holmberg K., Matthews A. Coat. Tribol. 1994;Elsevier, Amsterdam.
3. Sundgren J.-E. Thin Solid Films. 128:1985;21.
4. Donohue L.A., Smith I.J., Münz W.-D., Petrov I., Greene J.E. Surf. Coat. Technol. 94/95:1997;226.
5. Hsieh J.H., Liang C., Yu C.H., Wu W. Surf. Coat. Technol. 108/109:1998;132.
6. Assman W., Huber H., Steinhausen Ch., Dobler M., Glückler H., Weidinger A. Nucl. Instr. Meth. B. 89:1994;131.
7. Doolittle L.R. Nucl. Instr. Meth. B. 9:1985;344.
8. Oliver W.C., Pharr G.M. J. Mater. Res. 7:1992;1564.
9. Ohring M. The Materials Science of Thin Films. 1992;Academic Press, London. Chapter 9.
10. Davis C.A. Thin Solid Films. 226:1993;30.
11. Andersen P., Moske M., Dyrbye K., Bøttiger J. Thin Solid Films. 1999;. (in press).