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Volumn 88, Issue 8, 2006, Pages

Phonon-energy-coupling enhancement: Strengthening the chemical bonds of the SiO 2/Si system

Author keywords

[No Author keywords available]

Indexed keywords

OXIDE STRUCTURE; PHONON-ENERGY-COUPLING ENHANCEMENT; RAPID THERMAL PROCESSING (RTP); THIN OXIDES;

EID: 33644545724     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2177349     Document Type: Article
Times cited : (25)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.