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Volumn 64, Issue 1, 1998, Pages 41-49

Ultrasonic flexural Lamb-wave actuators based on PZT thin film

Author keywords

Flexural plate waves; Lamb waves; Lead zirconate titanate; Ultrasonic actuators

Indexed keywords

FABRICATION; THIN FILMS; TRANSDUCERS; ULTRASONIC WAVES;

EID: 0031701715     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)80056-3     Document Type: Article
Times cited : (25)

References (9)
  • 2
    • 0028742106 scopus 로고
    • Flexural-plate waves for sensors and micropumps
    • S.W. Wenzel, B.J. Costello and R.M. White, Flexural-plate waves for sensors and micropumps, Sensors Magazine, 47-49 (Dec.) (1994).
    • (1994) Sensors Magazine , vol.47-49 , Issue.DEC.
    • Wenzel, S.W.1    Costello, B.J.2    White, R.M.3
  • 3
    • 0043058551 scopus 로고
    • Silicon-based ultrasonic microsensors and micropumps
    • R.M. White, Silicon-based ultrasonic microsensors and micropumps, Integrated Ferroelectrics, 7 (1995) 353-358.
    • (1995) Integrated Ferroelectrics , vol.7 , pp. 353-358
    • White, R.M.1
  • 6
    • 0028495382 scopus 로고
    • Integrated-circuit-compatible design and technology of acoustic-wave-based microsensors
    • M.J. Vellekoop, G.W. Lubking, P.M. Sarro and A. Venema, Integrated-circuit-compatible design and technology of acoustic-wave-based microsensors, Sensors and Actuators A, 44 (1994) 249-263.
    • (1994) Sensors and Actuators A , vol.44 , pp. 249-263
    • Vellekoop, M.J.1    Lubking, G.W.2    Sarro, P.M.3    Venema, A.4
  • 8
    • 0040216633 scopus 로고
    • Anomalous behaviour of flexural waves in very thin immersed plates
    • Tucson, AZ, USA
    • H. Dabirikhah and C.W. Turner, Anomalous behaviour of flexural waves in very thin immersed plates, Proc. Ultrasonics Symp., Tucson, AZ, USA, 1992, pp. 313-317.
    • (1992) Proc. Ultrasonics Symp. , pp. 313-317
    • Dabirikhah, H.1    Turner, C.W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.