Piezoelectric cantilever microphone for photoacoustic GAS detector

Integrated Ferroelectrics

Volumn 35, Issue 1-4, 2001, Pages 177-184

  Ledermann, Nicolas ^a   Baborowski, Jacek ^a   Seifert, Andreas ^a   Willing, Bert ^a   Hiboux, Stephane ^a   Muralt, Paul ^a   Setter, Nava ^a   Forster, Martin ^b  

^a EPFL   (Switzerland)

^b Siemens Schweiz AG   (Switzerland)

Author keywords

Cantilever; MEMS; Microphone; Piezoelectric

Indexed keywords

CHEMICAL SENSORS; COMPOSITION; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; MICROPHONES; PIEZOELECTRICITY; PRESSURE GAGES; SOL-GELS; THIN FILMS;

DAMPING CHAMBER; PHOTOACOUSTIC GAS DETECTOR; PIEZOELECTRIC CANTILEVER MICROPHONE; PRESSURE SENSOR;

PIEZOELECTRIC DEVICES;

EID: 0035027121     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584580108016899     Document Type: Conference Paper

References (7)