Effect of H 2 dilution on Cat-CVD a-SiC:H films

Thin Solid Films

Volumn 501, Issue 1-2, 2006, Pages 173-176

  Swain, Bibhu P ^a   Rao, T K Gundu ^a   Roy, Mainak ^b   Gupta, Jagannath ^b   Dusane, R O ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

^b BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

FTIR; Hydrogen dilution; Raman spectra; TRPL; XPS

Indexed keywords

HYDROGEN DILUTION; TRPL;

AMORPHOUS MATERIALS; DEPOSITION; ENERGY GAP; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAPHITE; MIXTURES; RAMAN SCATTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

SILICON CARBIDE;

EID: 32644469891     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.183     Document Type: Conference Paper

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