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Volumn 198-200, Issue PART 1, 1996, Pages 490-494

Light-soaking in a-SiC:H films grown by PECVD in undiluted and hydrogen diluted SiH4 + CH4 gas mixtures

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CHEMICAL VAPOR DEPOSITION; DEFECTS; ELECTRONIC PROPERTIES; ENERGY GAP; FILM GROWTH; METHANE; MIXTURES; OPTICAL PROPERTIES; PHOTOCONDUCTIVITY; SEMICONDUCTING SILICON COMPOUNDS; SILANES;

EID: 0030563571     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-3093(95)00754-7     Document Type: Article
Times cited : (13)

References (24)
  • 1
    • 0027806812 scopus 로고
    • Amorphous silicon technology 1993
    • Material Research Society, Pittsburgh, PA
    • Y. Li, Amorphous Silicon Technology 1993, Mater. Res. Soc. Symp. Proc. 297 (Material Research Society, Pittsburgh, PA, 1993) p. 803.
    • (1993) Mater. Res. Soc. Symp. Proc. , vol.297 , pp. 803
    • Li, Y.1
  • 3
    • 3743089128 scopus 로고
    • Amorphous silicon technology 1992
    • Material Research Society, Pittsburgh, PA
    • J. Folsch, H. Rubel and H. Schade, Amorphous Silicon Technology 1992, Mater. Res. Soc. Symp. Proc. 258 (Material Research Society, Pittsburgh, PA, 1992) p. 631.
    • (1992) Mater. Res. Soc. Symp. Proc. , vol.258 , pp. 631
    • Folsch, J.1    Rubel, H.2    Schade, H.3
  • 10
    • 0042182906 scopus 로고
    • Amorphous silicon technology 1992
    • Material Research Society, Pittsburgh, PA
    • Y. Li, A. Catalano and B.F. Fieselmann, Amorphous Silicon Technology 1992, Mater. Res. Soc. Symp. Proc. 258 (Material Research Society, Pittsburgh, PA, 1992) p. 923.
    • (1992) Mater. Res. Soc. Symp. Proc. , vol.258 , pp. 923
    • Li, Y.1    Catalano, A.2    Fieselmann, B.F.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.