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Thin Solid Films

Volumn 395, Issue 1-2, 2001, Pages 244-248

Photoluminescent, wide-bandgap a-SiC:H alloy films deposited by Cat-CVD using acetylene

(5) Kumbhar, Alka a Patil, Samadhan B a Kumar, Sanjay a Lal, R a Dusane, R O a

a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY (India)

Author keywords

Acetylene; Chemical vapour deposition (CVD); Fourier transform infrared spectroscopy (FTIR); Opto electronic devices

Indexed keywords

ACETYLENE; CARBON; CHEMICAL VAPOR DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; LIGHT EMISSION; OPTOELECTRONIC DEVICES; PHOTOLUMINESCENCE; SILANES; SILICON ALLOYS; SPECTRUM ANALYSIS; THIN FILMS;

GAS MIXTURES;

AMORPHOUS FILMS;

EID: 0035801106 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01263-9 Document Type: Conference Paper

Times cited : (42)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.