Room-temperature nanocontact printing using soft template

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 1, 2006, Pages 195-199

  Nakamatsu, Ken Ichiro ^a   Tone, Katsuhiko ^b   Namatsu, Hideo ^c   Matsui, Shinji ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b Meisyo Co   (Japan)

^c NTT Basic Research Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; PARAFFINS; POLYETHYLENES; POLYMETHYL METHACRYLATES; SILVER; THERMAL EFFECTS;

CONTACT PRINTING; ROOM-TEMPERATURE; TRANSFER MATERIALS;

NANOSTRUCTURED MATERIALS;

EID: 31544451870     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2151913     Document Type: Article

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