Fabrication of hybrid bilayer nanostructure by duo-mold imprinting

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 1, 2006, Pages 255-258

  Zhao, Wei ^a   Low, Hong Yee ^a  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; FABRICATION; INTERFACIAL ENERGY; MOLDING; SUBSTRATES; WETTING;

ADHESION DIFFERENCE; DUO-MOLD IMPRINTING; PREFERENTIAL DEMOLDING;

NANOSTRUCTURED MATERIALS;

EID: 31544438335     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2163881     Document Type: Article

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