Polarization reversal of (111) - And (100)/(001)-oriented Pb(Zr,Ti)O 3 thin film capacitors with SrRuO3 and IrO2 thin film top electrodes

Journal of the Ceramic Society of Japan

Volumn 112, Issue 1306, 2004, Pages 311-315

  Tsukada, Mineharu ^a   Mushiga, Mitsuteru ^a,b   Cross, Jeffrey S ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

^b FUJITSU LABORATORIES OF AMERICA   (United States)

Author keywords

Fatigue; Orientation; Switchable polarization; TEM

Indexed keywords

CAPACITORS; CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; DEPOSITION; ELECTRODES; EPITAXIAL GROWTH; FATIGUE OF MATERIALS; INTERFACES (MATERIALS); IRIDIUM COMPOUNDS; RUTHENIUM COMPOUNDS; SPUTTERING; STRONTIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

EPITAXIAL-LIKE INTERFACE; SWITCHABLE POLARIZATION; THIN FILM CAPACITORS; TOP ELECTRODES;

THIN FILMS;

EID: 3142702712     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.112.311     Document Type: Article

References (22)

1. Dhote, A. M., Madhukar, S., Wei, W., Venkatesan, T., Ramesh, R. and Cotell, C. M., Appl. Phys. Lett., Vol. 68, pp. 1350-1352 (1996).
2. Cillessen, J. F. M., Prins, M. W. J. and Wolf, R. M., J. Appl. Phys., Vol. 81, pp. 2777-2783 (1997).
3. Yin, J., Zhu, T., Liu, Z. G. and Yu, T., Appl. Phys. Lett., Vol. 75, pp. 3698-3700 (1999).
4. Hong, J. W., Jo, W., Kim, D. C., Cho, S. M., Nam, H. J., Lee, H. M. and Bu, J. U., Appl. Phys. Lett., Vol. 75, pp. 3183-3185 (1999).
5. Cross, J. S., Fujiki, M., Tsukada, M., Kotaka, Y. and Goto, Y., Integrated Ferroelectrics, Vol. 21, pp. 263-271 (1998).
6. Stolichnov, I., Tagantsev, A., Setter, N., Cross, J. S. and Tsukada, M., Appl. Phys. Lett., Vol. 75, pp. 1790-1792 (1999).
7. Stolichnov, I., Tagantsev, A., Setter, N., Cross, J. S. and Tsukada, M., Appl. Phys. Lett., Vol. 74, pp. 3552-3554 (1999).
8. Cross, J. S., Fujiki, M., Tsukada, M., Matsuura, K. and Otani, S., Jpn. J. Appl. Phys., Vol. 38, pp. L448-L450 (1999).
9. Cross, J. S., Fujiki, M., Tsukada, M., Matsuura, K., Otani, S., Tomotani, M., Kotaka, Y. and Goto, Y., Integrated Ferroelectrics, Vol. 25, pp. 265-273 (1999).
10. Tsukada, M., Cross, J. S., Fujiki, M., Tomotani, M. and Kotaka, Y., Key En. Mater., Vol. 181-182, pp. 69-72 (2000).
11. Morimoto, T., Hidaka, O., Yamakawa, K., Arisumi, O., Kanaya, H., Iwamoto, T., Kumura, Y., Kunishima, I. and Tanaka, S., Jpn. J. Appl. Phys., Vol. 39, pp. 2110-2113 (2000).
12. Stolichnov, I., Tagantsev, A., Setter, N., Okhonin, S., Fazan, P., Cross, J. S. and Tsukada, M., J. Appl. Phys., Vol. 87, pp. 1925-1931 (2000).
13. Tsukada, M., Mushiga, M., Watanabe, J. and Cross, J. S., Jpn. J. Appl. Phys., Vol. 41, pp. L1312-L1314 (2002).
14. Bornand, V., Torlier-McKinstry, S., Takemura, K. and Randall, C. A., J. Appl. Phys., Vol. 87, pp. 3965-3972 (2000).
15. Cattan, E., Velu, G., Jaber, B., Remiens, D. and Thierry, B., Appl. Phys. Lett., Vol. 70, pp. 1718-1720 (1997).
16. Ishikawa, K., Sakura, K., Fu, D., Yamada, S., Suzuki, H. and Hayashi, T., Jpn. J. Appl. Phys., Vol. 37, pp. 5128-5131 (1998).
17. Velu, G., Haccart, T., Jader, B. and Remiens, D., J. Vac. Sci. Tech. A, Vol. 16, pp. 2442-2447 (1998).
18. Du, H., Johnson, D. W., Jr., Zhu, W., Graebner, J. E., Kammlott, G. W., Jin, S., Rogers, J., Willett, R. and Fleming, R. M., J. Appl. Phys., Vol. 86, pp. 2220-2225 (1999).
19. Fox, G. R., Chu, F. and Davenport, T., J. Vac. Sci. Tech. B, Vol. 19, pp. 1967-1971 (2001).
20. Traynor, S. D., Hadnagy, T. D. and Kammerdiner, L., Integrated Ferroelectrics, Vol. 16, pp. 63-76 (1997).
21. Hadnagy, T. D., Traynor, S. D. and Dalton, D. I., Integrated Ferroelectrics, Vol. 16, pp. 219-227 (1997).
22. Stolichnov, I., Tagantsev, A., Setter, N., Cross, J. S. and Tsukada, M., Appl. Phys. Lett., Vol. 74, pp. 3552-3554 (1999).