Evaluation of (Pb, La)(Zr, Ti)O3 (PLZT) capacitors of different film thicknesses with Pt/SrRuO3 top electrodes

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 38, Issue 4 B, 1999, Pages

  Cross, Jeffrey S ^a   Fujiki, Mirsushi ^a   Tsukada, Mineharu ^a   Matsuura, Katsuyoshi ^a   Otani, Seigen ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL ORIENTATION; ELECTRIC POTENTIAL; ELECTRODES; FERROELECTRIC DEVICES; LEAD COMPOUNDS; PLATINUM; POLARIZATION; SILICA; SILICON WAFERS; SPUTTER DEPOSITION; STRONTIUM COMPOUNDS;

CHEMICAL SOLUTION DEPOSITION (CSD); COERCIVE VOLTAGE; LEAD LANTHANUM ZIRCONATE TITANATE; STRONTIUM RUTHENATE;

CAPACITORS;

EID: 0032650259     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.l448     Document Type: Article

References (17)