Evaluation of PZT capacitors with Pt/SrRuO3 electrodes for FeRAM

Integrated Ferroelectrics

Volumn 25, Issue 1-4, 1999, Pages 265-273

  Cross, Jeffrey S ^a   Fujiki, Mitsushi ^a   Tsukada, Mineharu ^a   Matsuura, Katsuyoshi ^a   Otani, Seigen ^a   Tomotani, Miki ^a   Kataoka, Yuji ^a   Kotaka, Yasutoshi ^a   Goto, Yasuyuki ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

CSD; FeCap; Interdiffusion; Leakage; PZT; SIMS; SrRuO3

Indexed keywords

ANNEALING; ELECTRODES; FATIGUE OF MATERIALS; FILM PREPARATION; GRAIN BOUNDARIES; INTERDIFFUSION (SOLIDS); LEAD COMPOUNDS; LEAKAGE CURRENTS; SECONDARY ION MASS SPECTROMETRY; SILICON WAFERS; SPUTTER DEPOSITION;

LEAD ZIRCONATE TITANATE; STRONTIUM RATHENIUM OXIDE;

CAPACITORS;

EID: 0033315131     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589908210177     Document Type: Article

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