Characterization of PZT capacitors with SrRuO3 electrodes

Integrated Ferroelectrics

Volumn 21, Issue 1 -4 pt 1, 1998, Pages 263-271

  Cross, Jeffrey S ^a   Fujiki, Mitsushi ^a   Tsukada, Mineharu ^a   Kotaka, Yasutoshi ^a   Goto, Yasuyuki ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRODES; FERROELECTRIC DEVICES; INTERFACES (MATERIALS); LEAD COMPOUNDS; POLARIZATION; SILICON WAFERS; SPUTTER DEPOSITION; STRONTIUM COMPOUNDS;

CHEMICAL SOLUTION DEPOSITION (CSD); SWITCHING PULSE POLARIZATION;

CAPACITORS;

EID: 0032308907     PISSN: 10584587     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/10584589808202069     Document Type: Article

References (12)