Evaluation of Pb(Zr,Ti)O3 capacitors with top SrRuO3 electrodes

Key Engineering Materials

Volumn , Issue 181-182, 2000, Pages 69-72

  Tsukada, M ^a   Cross, J S ^a   Fujiki, M ^a   Tomotani, M ^a   Kotaka, Y ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

Capacitor; Ferroelectrics; Leakage Current; Pb(Zr,Ti)O3; SrPbO3; SrRuO3

Indexed keywords

ANNEALING; DIFFUSION IN SOLIDS; ELECTRODES; FATIGUE OF MATERIALS; FERROELECTRIC DEVICES; GRAIN BOUNDARIES; INTERDIFFUSION (SOLIDS); LEAD COMPOUNDS; LEAKAGE CURRENTS; SECONDARY ION MASS SPECTROMETRY; SPUTTERING; STRONTIUM COMPOUNDS;

CHEMICAL SOLUTION DEPOSITION; FERROELECTRIC CAPACITORS; STRONTIUM LEAD OXIDES; STRONTIUM RUTHENIUM OXIDES;

CERAMIC CAPACITORS;

EID: 0033702819     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Review

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