-
2
-
-
0002893970
-
Simulation tool for design and management optimization of automated interbay material handling and storage systems for large wafer fab
-
CARDARELLI, G. and PELAGAGGE, P. M., 1995, Simulation tool for design and management optimization of automated interbay material handling and storage systems for large wafer fab. IEEE Transactions on Semiconductor Manufacturing, 8, 44-49.
-
(1995)
IEEE Transactions on Semiconductor Manufacturing
, vol.8
, pp. 44-49
-
-
Cardarelli, G.1
Pelagagge, P.M.2
-
3
-
-
0041958042
-
-
Stuttgart: Tecnomatix Technologies
-
eM-Plant, 2000, Objects Manual Version 4.5 (Stuttgart: Tecnomatix Technologies).
-
(2000)
Objects Manual Version 4.5
-
-
-
4
-
-
0031366854
-
AMHS for 300-mm wafer
-
KUROSAKI, R., NAGAO, N., KOMADA, H., WATANABE, Y. and YANO, H., 1997, AMHS for 300-mm wafer. IEEE International Symposium on Semiconductor Manufacturing Conference, pp. D-13-16.
-
(1997)
IEEE International Symposium on Semiconductor Manufacturing Conference
-
-
Kurosaki, R.1
Nagao, N.2
Komada, H.3
Watanabe, Y.4
Yano, H.5
-
5
-
-
0041958041
-
Connecting transport AMHS in a wafer fab
-
LIN, J. T., WANG, F. K. and WU, C. K., 2003a, Connecting transport AMHS in a wafer fab. International Journal of Production Research, 41, 529-544.
-
(2003)
International Journal of Production Research
, vol.41
, pp. 529-544
-
-
Lin, J.T.1
Wang, F.K.2
Wu, C.K.3
-
6
-
-
0042386738
-
Simulation analysis of the connecting transport AMHS in a wafer fab
-
LIN, J. T., WANG, F. K. and Wu, C. K., 2003b, Simulation analysis of the connecting transport AMHS in a wafer fab. IEEE Transactions on Semiconductor Manufacturing, 16, 555-564.
-
(2003)
IEEE Transactions on Semiconductor Manufacturing
, vol.16
, pp. 555-564
-
-
Lin, J.T.1
Wang, F.K.2
Wu, C.K.3
-
7
-
-
0035872172
-
Simulation analysis of dispatching rules for an automated interbay material-handling system in wafer fab
-
LIN, J. T., WANG, F. K. and YEN, P. Y., 2001, Simulation analysis of dispatching rules for an automated interbay material-handling system in wafer fab. International Journal Production Research, 39, 1221-1238.
-
(2001)
International Journal Production Research
, vol.39
, pp. 1221-1238
-
-
Lin, J.T.1
Wang, F.K.2
Yen, P.Y.3
-
8
-
-
0032256271
-
Simulation analysis of 300mm intrabay automation vehicle capacity alternatives
-
MACKULAK, G. T., LAWRENCE, F. P. and RAYTER, J., 1998, Simulation analysis of 300mm intrabay automation vehicle capacity alternatives. IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp. 445-450.
-
(1998)
IEEE/SEMI Advanced Semiconductor Manufacturing Conference
, pp. 445-450
-
-
Mackulak, G.T.1
Lawrence, F.P.2
Rayter, J.3
-
9
-
-
0020140765
-
Design of automatic guided vehicle systems
-
MAXWELL, W. L. and MUCKSTADT, J. A., 1982, Design of automatic guided vehicle systems. IIE Transactions, 14, 114-124.
-
(1982)
IIE Transactions
, vol.14
, pp. 114-124
-
-
Maxwell, W.L.1
Muckstadt, J.A.2
-
10
-
-
0034430673
-
A simulation-based cost modeling methodology for evaluation of interbay material handling in a semiconductor wafer fab
-
MURRAY, S., MACKULAK, G. T., FOWLER, J. W. and COVLIN, T., 2000, A simulation-based cost modeling methodology for evaluation of interbay material handling in a semiconductor wafer fab. Proceedings of the 2000 Winter Simulation Conference, pp. 1510-1517.
-
(2000)
Proceedings of the 2000 Winter Simulation Conference
, pp. 1510-1517
-
-
Murray, S.1
Mackulak, G.T.2
Fowler, J.W.3
Covlin, T.4
-
12
-
-
0033330364
-
Reducing model creation cycle time by automated conversion of a CAD AMHS layout design
-
PAPROTNY, I., ZHAO, W. and MACKULAK, G. T., 1999, Reducing model creation cycle time by automated conversion of a CAD AMHS layout design. Proceedings of the 1999 Winter Simulation Conference, pp. 799-783.
-
(1999)
Proceedings of the 1999 Winter Simulation Conference
, pp. 799-783
-
-
Paprotny, I.1
Zhao, W.2
Mackulak, G.T.3
-
13
-
-
0031200370
-
Integrated facility layout and material-handling system design in semiconductor fabrication facilities
-
PETERS, B. A. and YANG, T., 1997, Integrated facility layout and material-handling system design in semiconductor fabrication facilities. IEEE Transactions on Semiconductor manufacturing, 10, 360-369.
-
(1997)
IEEE Transactions on Semiconductor Manufacturing
, vol.10
, pp. 360-369
-
-
Peters, B.A.1
Yang, T.2
-
15
-
-
0033320285
-
Integration of 300mm fab layouts and material handling automation
-
PILLAI, D., QUINN, T., KRYDER, K. and CHARLSON, D., 1999, Integration of 300mm fab layouts and material handling automation. Proceedings, IEEE/CHMT Ninth International Electronic Manufacturing Technology Symposium, pp. 23-26.
-
(1999)
Proceedings, IEEE/CHMT Ninth International Electronic Manufacturing Technology Symposium
, pp. 23-26
-
-
Pillai, D.1
Quinn, T.2
Kryder, K.3
Charlson, D.4
-
17
-
-
0010842624
-
-
Minneapolis: State-Ease
-
STATE-EASE, 1997, Design-Expert Version 5.0.8 (Minneapolis: State-Ease).
-
(1997)
Design-expert Version 5.0.8
-
-
-
18
-
-
0035248599
-
Optimal bi-directional spine layout for overhead material-handling systems
-
TING, J. H. and TANCHOCO, J. M. A., 2001, Optimal bi-directional spine layout for overhead material-handling systems. IEEE Transactions on Semiconductor Manufacturing, 14, 57-64.
-
(2001)
IEEE Transactions on Semiconductor Manufacturing
, vol.14
, pp. 57-64
-
-
Ting, J.H.1
Tanchoco, J.M.A.2
|