AMHS for 300 mm wafer

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 1997, Pages

  Kurosaki, Ryo ^a   Nagao, Naoki ^a   Komada, Hiromi ^a   Watanabe, Yoshio ^a   Yano, Hiroshi ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MATERIALS HANDLING EQUIPMENT; SILICON WAFERS;

AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS); AUTOMATIC GUIDED VEHICLES (AGV);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031366854     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)