SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 1 B, 2005, Pages 732-735

Quantification of gas-phase H-atom number density by tungsten phosphate glass

(8) Morimoto, Takashi a Umemoto, Hironobu a Yoneyama, Koji a Masuda, Atsushi a Matsumura, Hideki a Ishibashi, Keiji b Tawarayama, Hiromasa c Kawazoe, Hiroshi d

a JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY (Japan)

b ANELVA Corporation ^* (Japan)

c TOKYO INSTITUTE OF TECHNOLOGY (Japan)

d Kawazoe Frontier Technol Corp (Japan)

Author keywords

Catalytic decomposition; H atom density; H atom sensor; Tungsten oxide; Tungsten phosphate glass

Indexed keywords

CATALYSIS; DECOMPOSITION; GASES; LASER APPLICATIONS; PHASE COMPOSITION; SENSORS; TUNGSTEN COMPOUNDS; VACUUM APPLICATIONS;

CATALYTIC DECOMPOSITION; H-ATOM DENSITY; H-ATOM SENSOR; TUNGSTEN OXIDE; TUNGSTEN PHOSPHATE GLASS;

GLASS;

EID: 17144413821 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.44.732 Document Type: Conference Paper

Times cited : (29)

References (31)

1
- 4243919480
- H. Umemoto, Y. Nozaki, M. Kitazoe, K. Horii, K. Ohara, D. Morita, K. Uchida, Y. Ishibashi, M. Komoda, K. Kamesaki, A. Izumi, A. Masuda and H. Matsumura: J. Non-Cryst. Solids 299-302 (2002) 9.
- (2002) J. Non-Cryst. Solids , vol.299-302 , pp. 9
- Umemoto, H.¹ Nozaki, Y.² Kitazoe, M.³ Horii, K.⁴ Ohara, K.⁵ Morita, D.⁶ Uchida, K.⁷ Ishibashi, Y.⁸ Komoda, M.⁹ Kamesaki, K.¹⁰ Izumi, A.¹¹ Masuda, A.¹² Matsumura, H.¹³

2
- 0025477149
- K. Nomoto, Y. Urano, J. L. Guizot, G. Ganguly and A. Matsuda: Jpn. J. Appl. Phys. 29 (1990) L1372.
- (1990) Jpn. J. Appl. Phys. , vol.29
- Nomoto, K.¹ Urano, Y.² Guizot, J.L.³ Ganguly, G.⁴ Matsuda, A.⁵

3
- 0002139241
- A. Matsuda: Thin Solid Films 337 (1999) 1.
- (1999) Thin Solid Films , vol.337 , pp. 1
- Matsuda, A.¹

4
- 0035246793
- M. Kondo and A. Matsuda: Thin Solid Films 383 (2001) 1.
- (2001) Thin Solid Films , vol.383 , pp. 1
- Kondo, M.¹ Matsuda, A.²

5
- 0037115808
- S. Agarwal, A. Takano, M. C. M. van de Sanden, D. Maroudas and E. S. Aydil: J. Chem. Phys. 117 (2002) 10805.
- (2002) J. Chem. Phys. , vol.117 , pp. 10805
- Agarwal, S.¹ Takano, A.² Van De Sanden, M.C.M.³ Maroudas, D.⁴ Aydil, E.S.⁵

6
- 0001344845
- A. von Keudell, T. Schwarz-Selinger and E. Jacob: J. Appl. Phys. 89 (2001) 2979.
- (2001) J. Appl. Phys. , vol.89 , pp. 2979
- Von Keudell, A.¹ Schwarz-Selinger, T.² Jacob, E.³

7
- 0009661538
- J. C. Angus and C. C. Hayman: Science 241 (1988) 913.
- (1988) Science , vol.241 , pp. 913
- Angus, J.C.¹ Hayman, C.C.²

8
- 21544480383
- M. Frenklach: J. Appl. Phys. 65 (1989) 5142.
- (1989) J. Appl. Phys. , vol.65 , pp. 5142
- Frenklach, M.¹

9
- 0000981553
- J. R. Abelson, L. Mandrell and J. R. Doyle: J. Appl. Phys. 76 (1994) 1856.
- (1994) J. Appl. Phys. , vol.76 , pp. 1856
- Abelson, J.R.¹ Mandrell, L.² Doyle, J.R.³

10
- 0036469464
- H. Umemoto, K. Ohara, D. Morita, Y. Nozaki, A. Masuda and H. Matsumura: J. Appl. Phys. 91 (2002) 1650.
- (2002) J. Appl. Phys. , vol.91 , pp. 1650
- Umemoto, H.¹ Ohara, K.² Morita, D.³ Nozaki, Y.⁴ Masuda, A.⁵ Matsumura, H.⁶

11
- 84975655837
- U. Meier, K. Kohse-Hoinghaus, L. Schafer and C.-P. Klages: Appl. Opt. 29 (1990) 4993.
- (1990) Appl. Opt. , vol.29 , pp. 4993
- Meier, U.¹ Kohse-Hoinghaus, K.² Schafer, L.³ Klages, C.-P.⁴

12
- 36449006980
- L. Schäfer, C.-P. Klages, U. Meier and K. Kohse-Höinghaus: Appl. Phys. Lett. 58 (1991) 571.
- (1991) Appl. Phys. Lett. , vol.58 , pp. 571
- Schäfer, L.¹ Klages, C.-P.² Meier, U.³ Kohse-Höinghaus, K.⁴

13
- 36449002841
- L. L. Connell, J. W. Fleming, H.-N. Chu, D. J. Vestyck, Jr., E. Jensen and J. E. Butler: J. Appl. Phys. 78 (1995) 3622.
- (1995) J. Appl. Phys. , vol.78 , pp. 3622
- Connell, L.L.¹ Fleming, J.W.² Chu, H.-N.³ Vestyck Jr., D.J.⁴ Jensen, E.⁵ Butler, J.E.⁶

14
- 0000660417
- A. Heya, A. Masuda and H. Matsumura: J. Non-Cryst. Solids 266-269 (2000) 619.
- (2000) J. Non-Cryst. Solids , vol.266-269 , pp. 619
- Heya, A.¹ Masuda, A.² Matsumura, H.³

15
- 0033726819
- A. Izumi, H. Sato, S. Hashioka, M. Kudo and H. Matsumura: Microelectro. Eng. 51-52 (2000) 495.
- (2000) Microelectro. Eng. , vol.51-52 , pp. 495
- Izumi, A.¹ Sato, H.² Hashioka, S.³ Kudo, M.⁴ Matsumura, H.⁵

16
- 0036778628
- A. Masuda, Y. Ishibashi, K. Uchida, K. Kamesaki, A. Izumi and H. Matsumura: Sol. Energy Mat. & Sol. Cells 74 (2002) 373.
- (2002) Sol. Energy Mat. & Sol. Cells , vol.74 , pp. 373
- Masuda, A.¹ Ishibashi, Y.² Uchida, K.³ Kamesaki, K.⁴ Izumi, A.⁵ Matsumura, H.⁶

17
- 0036655964
- A. Izumi and H. Matsumura: Jpn. J. Appl. Phys. 41 (2002) 4639.
- (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 4639
- Izumi, A.¹ Matsumura, H.²

18
- 0000342654
- H. Umemoto, T. Nakae, H. Hashimoto, K. Kongo and M. Kawasaki: J. Chem. Phys. 109 (1998) 5844.
- (1998) J. Chem. Phys. , vol.109 , pp. 5844
- Umemoto, H.¹ Nakae, T.² Hashimoto, H.³ Kongo, K.⁴ Kawasaki, M.⁵

19
- 0035340325
- S. Takashima, M. Hori, T. Goto and K. Yoneda: J. Appl. Phys. 89 (2001) 4727.
- (2001) J. Appl. Phys. , vol.89 , pp. 4727
- Takashima, S.¹ Hori, M.² Goto, T.³ Yoneda, K.⁴

20
- 0036818492
- H. L. Duan, G. A. Zaharias and S. F. Bent: Curr. Opin. Solid State & Mater. Sci. 6 (2002) 471.
- (2002) Curr. Opin. Solid State & Mater. Sci. , vol.6 , pp. 471
- Duan, H.L.¹ Zaharias, G.A.² Bent, S.F.³

21
- 0036539647
- K. Tonokura, K. Inoue and M. Koshi: J. Non-Cryst. Solids 299-302 (2002) 25.
- (2002) J. Non-Cryst. Solids , vol.299-302 , pp. 25
- Tonokura, K.¹ Inoue, K.² Koshi, M.³

22
- 0025795414
- A. Tkáč: Polym. Degrad. & Stab. 33 (1991) 171.
- (1991) Polym. Degrad. & Stab. , vol.33 , pp. 171
- Tkáč, A.¹

23
- 21844491420
- W. L. Gardner: J. Vac. Sci. & Technol. A 13 (1995) 763.
- (1995) J. Vac. Sci. & Technol. A , vol.13 , pp. 763
- Gardner, W.L.¹

24
- 0031078019
- V. P. Ershov, V. V. Fimushkin, M. V. Kulikov, Yu. K. Pilipenko and V. B. Shutov: Nucl, Instrum. & Methods Phys. Res. A 385 (1997) 435.
- (1997) Nucl, Instrum. & Methods Phys. Res. A , vol.385 , pp. 435
- Ershov, V.P.¹ Fimushkin, V.V.² Kulikov, M.V.³ Pilipenko, Yu.K.⁴ Shutov, V.B.⁵

25
- 0000727587
- N. Hishinuma: Rev. Sci. Instrum. 52 (1981) 313.
- (1981) Rev. Sci. Instrum. , vol.52 , pp. 313
- Hishinuma, N.¹

26
- 0020821778
- K. C. Harvey and C. Fehrenbach, Jr.: Rev. Sci. Instrum. 54 (1983) 1117.
- (1983) Rev. Sci. Instrum. , vol.54 , pp. 1117
- Harvey, K.C.¹ Fehrenbach Jr., C.²

27
- 0032620314
- H. Nienhaus, H. S. Bergh, B. Gergen, A. Majumdar, W. H. Weinberg and E. W. McFarland: Appl. Phys. Lett. 74 (1999) 4046.
- (1999) Appl. Phys. Lett. , vol.74 , pp. 4046
- Nienhaus, H.¹ Bergh, H.S.² Gergen, B.³ Majumdar, A.⁴ Weinberg, W.H.⁵ McFarland, E.W.⁶

28
- 17144383594
- T. H. Johnson: J. Franklin Inst. 207 (1929) 629.
- (1929) J. Franklin Inst. , vol.207 , pp. 629
- Johnson, T.H.¹

29
- 0142023800
- H. Umemoto, K. Ohara, D. Morita, T. Morimoto, M. Yamawaki, A. Masuda and H. Matsumura: Jpn. J. Appl. Phys. 42 (2003) 5315.
- (2003) Jpn. J. Appl. Phys. , vol.42 , pp. 5315
- Umemoto, H.¹ Ohara, K.² Morita, D.³ Morimoto, T.⁴ Yamawaki, M.⁵ Masuda, A.⁶ Matsumura, H.⁷

30
- 36449009418
- M. Green and Z. Hussain: J. Appl. Phys. 69 (1991) 7788.
- (1991) J. Appl. Phys. , vol.69 , pp. 7788
- Green, M.¹ Hussain, Z.²

31
- 0032600923
- M. Miyakawa, H. Hosono and H. Kawazoe: Mater. Res. Bull. 34 (1999) 115.
- (1999) Mater. Res. Bull. , vol.34 , pp. 115
- Miyakawa, M.¹ Hosono, H.² Kawazoe, H.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.