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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 8, 2003, Pages 5315-5321

Radical Species Formed by the Catalytic Decomposition of NH3 on Heated W Surfaces

(7) Umemoto, Hironobu a Ohara, Kentaro a Morita, Daisuke a Morimoto, Takashi a Yamawaki, Moroyuki a Masuda, Atsushi a Matsumura, Hideki a

a JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY (Japan)

Author keywords

Catalytic chemical vapor deposition; Catalytic decomposition; H atoms; NH radicals; NH2 radicals; NH3

Indexed keywords

AMMONIA; CHEMICAL VAPOR DEPOSITION; ENTHALPY; LASER BEAM EFFECTS; SPECTROSCOPIC ANALYSIS; TUNGSTEN;

CATALYTIC DECOMPOSITION;

CATALYSIS;

EID: 0142023800 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.42.5315 Document Type: Article

Times cited : (54)

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