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Volumn 23, Issue 5, 2005, Pages 1913-1923

Towards a controlled patterning of 10 nm silicon gates in high density plasmas

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL DIMENSION (CD) CONTROL; SILICON GATES;

EID: 31144441052     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2008272     Document Type: Article
Times cited : (25)

References (21)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.