Direct imprinting using soft mold and gas pressure for large area and curved surfaces

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 6, 2005, Pages 1687-1690

  Chang, Jer Haur ^a   Cheng, Fang Sung ^a   Chao, Chi Chung ^a   Weng, Yung Chun ^a   Yang, Sen Yeu ^a   Wang, Lon A ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

GASES; MOLDS; NITROGEN; PRESSURE EFFECTS;

IMPRINTING; SUB-MICRON STRUCTURE;

POLYMETHYL METHACRYLATES;

EID: 31044438053     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2073447     Document Type: Article

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