Vertical integration of hydrogenated amorphous silicon devices on CMOS circuits

Materials Research Society Symposium Proceedings

Volumn 869, Issue , 2005, Pages 3-14

  Wyrsch, N ^a   Miazza, C ^a   Ballif, C ^a   Shah, A ^a   Blanc, N ^b   Kaufmann, R ^b   Lustenberger, F ^b   Jarron, P ^c  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b CSEM   (Switzerland)

^c CERN   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CMOS INTEGRATED CIRCUITS; HYDROGENATION; MICROPROCESSOR CHIPS; MORPHOLOGY; SILICON SENSORS;

READOUT ELECTRONICS; SENSING DEVICES;

PHOTODIODES;

EID: 30644476746     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-869-d1.1     Document Type: Conference Paper

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