Fabrication of mechanical microstructures using amorphous silicon films on glass substrates

Materials Research Society Symposium-Proceedings

Volumn 609, Issue , 2000, Pages A2131-A2136

  Yeh, Chingwen ^a   Boyce, James B ^a   Ho, Jackson ^a   Lau, Rachel ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; AMORPHOUS SILICON; ANNEALING; CANTILEVER BEAMS; GLASS; MICROMACHINING; MICROSTRUCTURE; RESIDUAL STRESSES; SEMICONDUCTING FILMS; STICTION; SUBSTRATES; THERMAL EFFECTS;

MECHANICAL MICROSTRUCTURES; OXYNITRIDE FILMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034429711     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: 10.1557/proc-609-a21.3     Document Type: Article

References (5)

1. Micromechanical structures in amorphous silicon
2. Thin film micromachined structures for large-area applications
3. Supercritical carbon dioxide drying of microstructures