Mechanical assembly of three-dimensional microstructures from fine particles

Advanced Robotics

Volumn 11, Issue 2, 1996, Pages 169-185

  Miyazaki, Hideki ^a   Sato, Tomomasa ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; DYNAMICS; ELECTROSTATICS; MANIPULATORS; PARTICLES (PARTICULATE MATTER); POLYMERS; ROBOTICS; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL; VAN DER WAALS FORCES;

ADHESION FORCE; MICROROBOTICS; PHOTONIC CRYSTAL; PICK AND PLACE ACTIVITY;

ROBOTIC ASSEMBLY;

EID: 0031358455     PISSN: 01691864     EISSN: 15685535     Source Type: Journal    
DOI: 10.1163/156855397X00308     Document Type: Article

References (22)

1. E. Yablonovitch, “Inhibited spontaneous emission in solid-state physics and electronics,” Phys. Rev. Lett., vol. 58, pp. 2059-2062, 1987.
2. T. R. Christenson, J. Klein and H. Guckel, “An electromagnetic micro dynamometer,” in Proc. IEEE Int. Workshop on Micro Electro Mechanical Systems, Amsterdam, Netherlands, 1995, pp. 386-391.
3. L. Y. Lin, S. S. Lee, M. C. Wu and K. S. J. Pister, “Micromachined integrated optics for free-space interconnections,” in Proc. IEEE Int. Workshop on Micro Electro Mechanical Systems, Amsterdam, Netherlands, 1995, pp. 77-82.
4. R. S. Fearing, “Survey of sticking effects for micro parts handling,” in Proc. IEEE/RSJ Int. Conf. on Intelligent Robots and Systems, vol. 2, Pittsburgh, PA, 1995, pp. 212-217.
5. F. Arai, D. Andou and T. Fukuda, “Adhesion forces reduction for micro manipulation based on micro physics," in Proc. IEEE Int. Workshop on Micro Electro Mechanical Systems, San Diego, CA, 1996, pp. 354-359.
6. H. Misawa, K. Sasaki, M. Koshioka, N. Kitamura and H. Masuhara, “Multibeam laser manipulation and fixation of microparticles," Appl. Phys. Lett., vol. 60, pp. 310-312, 1992.
7. D. M. Eigler and E. K. Schweitzer, “Positioning single atoms with a scanning electron microscope," Nature, vol. 344, pp. 524-526, 1990.
8. D. M. Schaefer, R. Reifenberger, A. Patil and R. P. Andres, “Fabrication of two-dimensional arrays of nanometer-size clusters with the atomic force microscope.” Appl. Phys. Lett., vol. 66, pp. 1012-1014, 1995.
9. Y. Hatamura and H. Morishita, “Direct coupling system between nanometer world and human world,” in Proc. IEEE Micro Electro Mechanical Systems Workshop, Napa Valley, CA, 1990, pp. 203-208.
10. S. Johansson, Hybrid techniques in microroboticsin Proc. 1st I ARP Workshop on Micro Robotics and Systems, Karlsruhe, Germany, 1993, pp. 72-83.
11. H. Morishita and Y. Hatamura, “Development of ultra micro manipulator system under stereo SEM observation," in Proc. IEEE/RSJ Int. Conf. on Intelligent Robots and Systems, Yokohama, Japan, pp. 1717-1721.
12. Y. Hatamura, M. Nakao and T. Sato, “Construction of nano manufacturing world" Microsystem Technologies, vol. 1, pp. 155-162, 1995.
13. T. Suga and N. Hosoda, “A novel approach to assembly and interconnection for micro electro mechanical systems,” in Proc. IEEE Int. Workshop on Micro Electro Mechanical Systems, Amsterdam, Netherlands, 1995, pp. 413-418.
14. K. Koyano and T. Sato, “Micro object handling system with concentrated visual fields and new handling skills," in Proc. IEEE Int. Conf on Robotics Automat., Minneapolis, MN. 1996, pp. 2541-2548.
15. T. Sato, T. Kameya, H. Miyazaki and Y. Hatamura, “Hand-eye system in nano manipulation world," in Proc. IEEE Int. Conf. on Robotics Automat., Nagoya, Japan, 1995, pp. 59-66.
16. A.-L. Tiensuu, M. Bexell, J.-Ä. Schweitz, L. Smith and S. Johansson, “Assembling three-dimensional microstructures using gold-silicon eutectic bonding," Sensors and Actuators, vol. A45, pp. 227-236, 1994.
17. J. N. Israelachvili, Intermolecular and Surface Forces, 2nd edn. New York: Academic Press, 1992.
18. K. Okuyama, H. Masuda, K. Higashitani, M. Chikazawa and T. Kanazawa, “Interaction between two particles," J. Soc. Powder Technol. Japan, vol. 22, pp. 452-475. 1985 (in Japanese).
19. M. Nakao, K. Ishii, T. Sato and Y. Hatamura, “Prototypes of micro nontweezing handling tools with releasing mechanism," Trans. Japan Soc. Mech. Eng. C, vol. 61, pp. 1021-1026. 1995 (in Japanese).
20. K. Koyano, T. Kasaya, H. Miyazaki and T. Sato, “Measurement system for force acting on micro object," in Proc. 14th Conf of the Robotics Society of Japan, 1995, pp. 803-804 (in Japanese).
21. H. Miyazaki and T. Sato, “Fabrication of 3D quantum optical devices by pick-and-place forming,” in Proc. IEEE Int. Workshop on Micro Electro Mechanical Systems, San Diego, CA, 1996, pp. 318-324.
22. T. J. Shaffner and J. W. S. Hearle, “Recent advances in understanding specimen charging,” in Proc. 9th Ann. Scanning Electron Microscope Symp., Chicago, IL, 1976, pp. 61-70.