Nanostructured metals for enhanced performance of LIGA components

MPMD Fifth Global Innovations Proceedings, Surfaces and Interfaces in Nanostructured Materials and Trends in LIGA, Miniaturization, and Nanoscale Materials

Volumn , Issue , 2004, Pages 307-315

  Baghbanan, Mohammadreza ^a   Erb, Uwe ^a   Palumbo, Gino ^b  

^a UNIVERSITY OF TORONTO   (Canada)

^b Integran Technologies Inc   (Canada)

Author keywords

Hardness; LIGA; MEMS; Nanostructured Ni; Young's modulus

Indexed keywords

DENSITY (SPECIFIC GRAVITY); ELASTIC MODULI; ELECTRODEPOSITION; ENERGY STORAGE; HARDNESS; METALLOGRAPHIC MICROSTRUCTURE; RELIABILITY;

ELASTIC ENERGY STORAGE; MULTIFUNCTIONAL CAPABILITIES; SPECIFIC STRENGTH;

NANOSTRUCTURED MATERIALS;

EID: 3042738255     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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