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Volumn 160, Issue 12, 2002, Pages 30-33
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Tribological coatings for LIGA MEMS
a a a
a
NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTROPLATING;
MASKS;
MOLDING;
PHOTORESISTS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PROTECTIVE COATINGS;
TRIBOLOGY;
X RAY LITHOGRAPHY;
MICROFABRICATION;
MICROELECTROMECHANICAL DEVICES;
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EID: 0036928643
PISSN: 08827958
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Review |
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Times cited : (6)
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References (0)
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